ひずみセンサ一体型ダイアフラム構造水素ガスセンサの作製 (電子部品・材料)

ひずみセンサ一体型ダイアフラム構造水素ガスセンサの作製

(電子部品・材料)

Journal name: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 107(178) 2007.8.9・10

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Material Type: 記事
Title: ひずみセンサ一体型ダイアフラム構造水素ガスセンサの作製
Author/Editor: 渡辺優太
奥山澄雄
原田知親
Series Title: 電子部品・材料
Author Heading: 渡辺優太
奥山澄雄
原田知親
Alternative Title: Fabrication of the strain gauge integrated Si-diaphragm structure hydrogen gas sensor
Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue: 107(178) 2007.8.9・10
Volume: 107
Issue: 178
Pages: 45～48
Publication date of volume/issue (W3CDTF): 2007-08
ISSN (Periodical Title): 0913-5685
ISSN-L (Periodical Title): 0913-5685
Publication (Periodical Title): 東京 : 電子情報通信学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 水素
水素ガスセンサ
シリコン
マイクロマシンニング
hydrogen
hydrogen gas sensor
silicon
micromachining
NDLC: ZN33
Target Audience: 一般
Report No. (Article): CPM2007-44
Holding library: 国立国会図書館
Call No.: Z16-940
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8895799
http://id.ndl.go.jp/bib/8895799
Bibliographic Record Category (NDL): 632