固体錫ターゲットを用いたCO2レーザープラズマEUV光源のデブリ特性
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- Material Type
- 記事
- Author/Editor
- 植野 能史Georg Soumagne住谷 明 他
- Author Heading
- Alternative Title
- Characteristics of debris from a CO2 laser-produced plasma using a solid tin target for development of extreme ultraviolet source
- Periodical title
- レーザー研究 = The review of laser engineering : レーザー学会誌 / レーザー学会 編
- No. or year of volume/issue
- 35(7) 2007.7
- Volume
- 35
- Issue
- 7
- Pages
- 457～461