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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 井手 幸夫中村 聡志仁野 章弘 他
- Alternative Title
- Effects of nitrogen partial pressure on the properties of Al-Cr-N films prepared by DC reactive sputtering
- Periodical title
- 山口県産業技術センター研究報告 = Report of Yamaguchi Prefectural Industrial Technology Institute / 山口県産業技術センター 編
- No. or year of volume/issue
- (18) 2006.7
- Issue
- 18
- Pages
- 33～37
- Publication date of volume/issue (W3CDTF)
- 2006-07