雑誌金属
極薄バリア層自己形成...

極薄バリア層自己形成技術--冶金学的なアプローチ (特集 これだけは知っておきたい最新の配線・実装材料技術)

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極薄バリア層自己形成技術--冶金学的なアプローチ

(特集 これだけは知っておきたい最新の配線・実装材料技術)

Call No. (NDL)
Z17-289
Bibliographic ID of National Diet Library
8903527
Material type
記事
Author
伊藤 和博ほか
Publisher
東京 : アグネ技術センター
Publication date
2007-08
Material Format
Paper
Journal name
金属 77(8) (通号 1051) 2007.8
Publication Page
p.854~859
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Paper

Material Type
記事
Author/Editor
伊藤 和博
着本 亨
村上 正紀
Alternative Title
Self-formation of Ti-rich barrier layers in Cu(Ti)alloy films
Periodical title
金属
No. or year of volume/issue
77(8) (通号 1051) 2007.8
Volume
77
Issue
8