金属配線とALD技術 (特集これだけは知っておきたい最新の配線・実装材料技術)

金属配線とALD技術

(特集これだけは知っておきたい最新の配線・実装材料技術)

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: 金属配線とALD技術
Author/Editor: 宮博信
Series Title: 特集これだけは知っておきたい最新の配線・実装材料技術
Author Heading: 宮博信
Alternative Title: Metallic wiring and ALD technology
Periodical title: 金属
No. or year of volume/issue: 77(8) (通号 1051) 2007.8
Volume: 77
Issue: 8
Sequential issue number: 1051
Pages: 860～865
Publication date of volume/issue (W3CDTF): 2007-08
ISSN (Periodical Title): 0368-6337
ISSN-L (Periodical Title): 0368-6337
Publication (Periodical Title): 東京 : アグネ技術センター
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-289
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8903535
http://id.ndl.go.jp/bib/8903535
Bibliographic Record Category (NDL): 632