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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 大西 隆
- Series Title
- Author Heading
- Alternative Title
- Fabrication technique of damascene Cu interconnections by sputter deposition and high pressure annealing process
- Periodical title
- 金属
- No. or year of volume/issue
- 77(8) (通号 1051) 2007.8
- Volume
- 77
- Issue
- 8