Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 山口 勝己船上 誠足立 和俊 他
- Alternative Title
- A new environmental chamber for nano-meter position measurement and control on ultra-precision machine tools with interferometry
- Periodical title
- 日本機械学会論文集. C編
- No. or year of volume/issue
- 73(731) 2007.7
- Volume
- 73
- Issue
- 731
- Pages
- 2167～2173