ケイ化モリブデン薄膜高温発熱体の発熱特性の改善
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- Material Type
- 記事
- Author/Editor
- 伊東 佑規佐藤 雅志脇坂 憲一 他
- Alternative Title
- Improvement of heating characteristics of molybdenum silicide thin film electric heaters
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 127(8) 2007.8
- Volume
- 127
- Issue
- 8
- Pages
- 452～458