GaAsのスクラッチ加工におけるクラック発生機構の結晶方位依存性(第1報)GaAsにおけるクラック発生機構の特異性

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GaAsのスクラッチ加工におけるクラック発生機構の結晶方位依存性(第1報)GaAsにおけるクラック発生機構の特異性

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
8906681
Material type
記事
Author
森田 昇ほか
Publisher
東京 : 砥粒加工学会
Publication date
2007-09
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 51(9) (通号 301) 2007.9
Publication Page
p.547~552
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Paper Digital

Material Type
記事
Author/Editor
森田 昇
川堰 宣隆
田代 雄介 他
Alternative Title
Dependence of crack generation process on crystal orientation in scratching of gallium arsenide: 1st report: specificity of crack generation in gallium arsenide
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
51(9) (通号 301) 2007.9
Volume
51
Issue
9
Sequential issue number
301