Performance enhancement by local strain in <110> channel n-channel metal-oxide-semiconductor field-effect transistors on (111) substrate
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- Material Type
- 記事
- Author/Editor
- Wen-Cheng LoYa-Hsin KuoYao-Jen Lee 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 46(9A) (通号 659) 2007.9
- Volume
- 46
- Issue
- 9A
- Sequential issue number
- 659
- Pages
- 5715～5718