MEMSをLSIに融合 Si貫通配線による3次元化で開始 (LSIの壁をMEMSが打破)

MEMSをLSIに融合 Si貫通配線による3次元化で開始

(LSIの壁をMEMSが打破)

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Material Type: 記事
Title: MEMSをLSIに融合 Si貫通配線による3次元化で開始
Series Title: LSIの壁をMEMSが打破
Periodical title: Nikkei microdevices : デバイス・イノベーションをリードする
No. or year of volume/issue: (266) 2007.8
Issue: 266
Pages: 34～43
Publication date of volume/issue (W3CDTF): 2007-08
ISSN (Periodical Title): 1349-4619
ISSN-L (Periodical Title): 1349-4619
Publication (Periodical Title): 東京 : 日経BP社
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM13
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1088
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8909228
http://id.ndl.go.jp/bib/8909228
Bibliographic Record Category (NDL): 632