シリコン結晶技術と超...

シリコン結晶技術と超LSI ([「応用物理」創刊75周年記念]特集記事)

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シリコン結晶技術と超LSI

([「応用物理」創刊75周年記念]特集記事)

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
8914260
Material type
記事
Author
津屋 英樹
Publisher
東京 : 応用物理学会
Publication date
2007-08
Material Format
Paper
Journal name
応用物理 76(8) 2007.8
Publication Page
p.906~912
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Paper

Material Type
記事
Author/Editor
津屋 英樹
Author Heading
Alternative Title
Silicon crystal technologies for ultra large scale integration
Periodical title
応用物理
No. or year of volume/issue
76(8) 2007.8
Volume
76
Issue
8