Effects of α,ω-diphenylazophenoxy polyethylene gIycol on copper deposition

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Material Type: 記事
Title: Effects of α,ω-diphenylazophenoxy polyethylene gIycol on copper deposition
Author/Editor: Masaharu Sugimoto
Toshiaki Matsubara
Hideo Honma 他
Author Heading: Masaharu Sugimoto
Toshiaki Matsubara
Hideo Honma
Periodical title: マテリアルライフ学会誌
No. or year of volume/issue: 19(3) 2007.7
Volume: 19
Issue: 3
Pages: 132～135
Publication date of volume/issue (W3CDTF): 2007-07
ISSN (Periodical Title): 1346-0633
ISSN-L (Periodical Title): 1346-0633
Publication (Periodical Title): 東京 : マテリアルライフ学会
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: Copper electroplating
Via-filling
Additives
Polyethylene glycol derivative
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1501
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8914921
http://id.ndl.go.jp/bib/8914921
Bibliographic Record Category (NDL): 632