基板バイアスにより制御されたZnO薄膜の結晶性とドライエッチングにより形成される側壁形状との相関

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Material Type: 記事
Title: 基板バイアスにより制御されたZnO薄膜の結晶性とドライエッチングにより形成される側壁形状との相関
Author/Editor: 平松孝浩
古田守
古田寛他
Author Heading: 平松孝浩
古田守
古田寛
Alternative Title: Correlation between the crystallinity controlled by rf substrate bias and sidewall morphology on dry-etched ZnO films
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 50(7) 2007.7
Volume: 50
Issue: 7
Pages: 498～501
Publication date of volume/issue (W3CDTF): 2007-07
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8915914
http://id.ndl.go.jp/bib/8915914
Bibliographic Record Category (NDL): 632