Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 嶋崎 綾子桜井 宏紀吉村 玲子 他
- Alternative Title
- Contamination control of metallic impurities in ULSI manufacturing process: diffusion behavior of new material elements
- Periodical title
- 電子情報通信学会論文誌. C, エレクトロニクス = The IEICE transactions on electronics. C / 電子情報通信学会 編
- No. or year of volume/issue
- 90(8) (通号 476) 2007.8
- Volume
- 90
- Issue
- 8
- Sequential issue number
- 476