量子ビーム応用最前線...

量子ビーム応用最前線 PBWで三次元微細加工技術の新地平を拓く

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量子ビーム応用最前線 PBWで三次元微細加工技術の新地平を拓く

Call No. (NDL)
Z16-362
Bibliographic ID of National Diet Library
8917658
Material type
記事
Author
打矢 直之ほか
Publisher
東京 : 日刊工業出版プロダクション ; 1998-2011
Publication date
2007-09
Material Format
Paper
Journal name
原子力eye 53(9) (通号 630) 2007.9
Publication Page
p.48~51
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Paper

Material Type
記事
Author/Editor
打矢 直之
古田 祐介
西川 宏之 他
Periodical title
原子力eye
No. or year of volume/issue
53(9) (通号 630) 2007.9
Volume
53
Issue
9
Sequential issue number
630
Pages
48~51