Novel low reflective index fluoropolymers based top anti-reflective coatings (TARC) for 193-nm lithography
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- Material Type
- 記事
- Author/Editor
- Tsuneo YamashitaTakashi HayamiTakuji Ishikawa 他
- Author Heading
- Periodical title
- Journal of photopolymer science and technology
- No. or year of volume/issue
- 20(3) 2007
- Volume
- 20
- Issue
- 3
- Pages
- 353～358
- Publication date of volume/issue (W3CDTF)
- 2007