Holdings of Libraries in Japan
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 中原 良彦土肥 俊郎
- Alternative Title
- The advanced CMP process of SiC single crystal
- Periodical title
- 埼玉大学地域共同研究センター紀要 = Report of Cooperative Research Center, Saitama University
- No. or year of volume/issue
- (7) 2006年度
- Issue
- 7
- Pages
- 11～13
- Publication date of volume/issue (W3CDTF)
- 2006