銅めっき薄膜機械特性の微細組織依存性 (特集 マイクロマテリアル)
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- Material Type
- 記事
- Title
- Author/Editor
- 玉川 欣治作谷 和彦三浦 英生
- Series Title
- Alternative Title
- Effect of micro texture of electroplated copper thin films on their mechanical properties
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 56(10) 2007.10
- Volume
- 56
- Issue
- 10