熱CVD法による超微...

熱CVD法による超微粒子コーティング装置を用いたSiC/Si3N4複合粉体の作製

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熱CVD法による超微粒子コーティング装置を用いたSiC/Si3N4複合粉体の作製

Call No. (NDL)
Z17-314
Bibliographic ID of National Diet Library
9300053
Material type
記事
Author
上宮 成之ほか
Publisher
仙台 : 日本金属学会 ; 1937-
Publication date
2007-12
Material Format
Paper
Journal name
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials 71(12) 2007.12
Publication Page
p.1089~1093
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Paper Digital

Material Type
記事
Author/Editor
上宮 成之
英 敬信
小島 紀徳 他
Alternative Title
Fabrication of SiC/Si3N4 composite particles by ultrafine-powder coating reactor using thermal CVD technique
Periodical title
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
No. or year of volume/issue
71(12) 2007.12
Volume
71
Issue
12
Pages
1089~1093