シリコン酸窒化膜の安定性と電子構造に関する理論研究の現状(小特集極表面の窒化--その制御と計測)

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Material Type: 記事
Title: シリコン酸窒化膜の安定性と電子構造に関する理論研究の現状
Author/Editor: 土井謙太郎
吉田聖一
上原寛貴他
Series Title: 小特集極表面の窒化--その制御と計測
Author Heading: 土井謙太郎
吉田聖一
上原寛貴
Alternative Title: Present progress on theoretical studies of stability and electronic structures of silicon oxynitride thin film
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 50(11) 2007.11
Volume: 50
Issue: 11
Pages: 647～651
Publication date of volume/issue (W3CDTF): 2007-11
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9303552
http://id.ndl.go.jp/bib/9303552
Bibliographic Record Category (NDL): 632