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高周波マグネトロンスパッタリング法により作製した結晶性GaTe薄膜の膜構造と光吸収スペクトル

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高周波マグネトロンスパッタリング法により作製した結晶性GaTe薄膜の膜構造と光吸収スペクトル

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
9303841
Material type
記事
Author
大山 昌憲ほか
Publisher
東京 : 日本真空協会
Publication date
2007-11
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 50(11) 2007.11
Publication Page
p.678~679
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Paper

Material Type
記事
Author/Editor
大山 昌憲
伊藤 浩
竹内 学
Alternative Title
Film structure and photo absorption spectrum of crystalline GaTe thin films growth by radio-frequency magnetron sputtering method
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
50(11) 2007.11
Volume
50
Issue
11
Pages
678~679