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- Material Type
- 記事
- Author/Editor
- 栗巣 普揮高橋 直樹服部 賢
- Series Title
- Alternative Title
- Report on 17th international vacuum congress・13th international conference on surface science・international conference on nano science and technology, IVC-17/ICSS-13 and ICN+T2007
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 50(12) 2007.12
- Volume
- 50
- Issue
- 12