Ion beam alignment procedures using a faraday cup or a silicon dioxide film on silicon substrate with auger electron microscope

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Ion beam alignment procedures using a faraday cup or a silicon dioxide film on silicon substrate with auger electron microscope

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Material Type: 記事
Title: Ion beam alignment procedures using a faraday cup or a silicon dioxide film on silicon substrate with auger electron microscope
Author/Editor: N. Urushihara
N. Sanada
D. Paul 他
Author Heading: N. Urushihara
N. Sanada
D. Paul
Periodical title: Journal of surface analysis / 表面分析研究会編
No. or year of volume/issue: 14(2) 2008.1
Volume: 14
Issue: 2
Pages: 124～130
Publication date of volume/issue (W3CDTF): 2008-01
ISSN (Periodical Title): 1341-1756
ISSN-L (Periodical Title): 1341-1756
Publication (Periodical Title): 東京 : 表面分析研究会
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-B66
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9341673
http://id.ndl.go.jp/bib/9341673
Bibliographic Record Category (NDL): 632