新素材時代の到来製造プロセスに新しい展開

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Material Type: 記事
Title: 新素材時代の到来製造プロセスに新しい展開
Author/Editor: Ravi Kanjolia
Author Heading: Ravi Kanjolia
Alternative Title: New materials in semiconductor fabrication: An evolutionary process
Periodical title: Semiconductor international. 日本版
No. or year of volume/issue: 5(2) 2008.2
Volume: 5
Issue: 2
Pages: 24～29
Publication date of volume/issue (W3CDTF): 2008-02
ISSN (Periodical Title): 1349-6425
ISSN-L (Periodical Title): 1349-6425
Publication (Periodical Title): 東京 : リード・ビジネス・インフォメーション
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-E304
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9364327
http://id.ndl.go.jp/bib/9364327
Bibliographic Record Category (NDL): 632