吸引キャビテーション援用砥粒加工を用いたマイクロパターニング (特集 研磨装置の進展と今後の展開)
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- Material Type
- 記事
- Author/Editor
- 大橋 一仁王 栄軍松岡 紘一 他
- Series Title
- Alternative Title
- Micro patterning using cavitation-aided abrasive machining in suction flow
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 52(3) (通号 307) 2008.3
- Volume
- 52
- Issue
- 3