イオンビーム援用BN薄膜の作製と内部応力発生機構の検討

Journal name: プラズマ応用科学 = Applied plasma science : journal of IAPS 15(2) 2007.12

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Material Type: 記事
Title: イオンビーム援用BN薄膜の作製と内部応力発生機構の検討
Author/Editor: 花木聡
冷波
山下正人他
Author Heading: 花木聡
冷波
山下正人
Alternative Title: Preparation of BN films by ion-beam-assisted deposition and investigation of generation mechanism of internal stress
Periodical title: プラズマ応用科学 = Applied plasma science : journal of IAPS
No. or year of volume/issue: 15(2) 2007.12
Volume: 15
Issue: 2
Pages: 166～170
Publication date of volume/issue (W3CDTF): 2007-12
ISSN (Periodical Title): 1340-3214
ISSN-L (Periodical Title): 1340-3214
Publication (Periodical Title): [茨木] : プラズマ応用科学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Ion mixing and vapor deposition
BN films
Acceleration voltage
Molecular dynamics
Crystal structure
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-B41
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9420724
http://id.ndl.go.jp/bib/9420724
Bibliographic Record Category (NDL): 632