大気中無潤滑下におけるDLC-Si膜の低摩擦特性
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- Material Type
- 記事
- Author/Editor
- 森 広行高橋 直子中西 和之 他
- Alternative Title
- Low friction property of DLC-Si films under dry sliding condition
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 59(6) 2008.6
- Volume
- 59
- Issue
- 6
- Pages
- 401～407