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- Material Type
- 記事
- Author/Editor
- 中村 真貴生田 公洋青木 孝憲 他
- Alternative Title
- Ultra thin al-doped transparent conducting zinc oxide films fabricated by pulsed laser deposition method
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(5) 2008.5
- Volume
- 51
- Issue
- 5
- Pages
- 323~325