Degradation of hydrocarbon fluids in the immersion lithography at 193 nm

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Material Type: 記事
Title: Degradation of hydrocarbon fluids in the immersion lithography at 193 nm
Author/Editor: Naphtali A. O'Connor
Vladimir Liberman
Xuegong Lei 他
Author Heading: Naphtali A. O'Connor
Vladimir Liberman
Xuegong Lei
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 21(5) 2008
Volume: 21
Issue: 5
Pages: 607～611
Publication date of volume/issue (W3CDTF): 2008
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: immersion lithography
hydrocarbon polymerization
refractive index
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9548431
http://id.ndl.go.jp/bib/9548431
Bibliographic Record Category (NDL): 632