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フォトリソグラフィー技術を用いた固体高分子電解質膜へのパターン電極形成

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フォトリソグラフィー技術を用いた固体高分子電解質膜へのパターン電極形成

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
9578209
Material type
記事
Author
菊池 邦友ほか
Publisher
東京 : 精密工学会
Publication date
2008-07
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 74(7) (通号 883) 2008.7
Publication Page
p.719~723
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Paper Digital

Material Type
記事
Author/Editor
菊池 邦友
土谷 茂樹
三輪 昌史 他
Alternative Title
Formation of patterned electrode on solid polymer electrolyte using photolithography technique
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
74(7) (通号 883) 2008.7
Volume
74
Issue
7
Sequential issue number
883