微傾斜SiC(0001)表面上の酸窒化シリコン薄膜の作製と低速電子回折による構造解析
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- Material Type
- 記事
- Author/Editor
- 水野 清義白澤 徹郎田中 悟 他
- Alternative Title
- Formation of silicon oxynitride on vicinal SiC(0001) and structure determination using low-energy electron diffraction
- Periodical title
- 応用物理
- No. or year of volume/issue
- 77(10) 2008.10
- Volume
- 77
- Issue
- 10
- Pages
- 1240～1243