ナノテク最前線ナノ秒レーザによる単結晶シリコンの内部改質層形成機構の解析

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Material Type: 記事
Title: ナノテク最前線ナノ秒レーザによる単結晶シリコンの内部改質層形成機構の解析
Author/Editor: 大村悦二
熊谷正芳
Author Heading: 大村悦二
熊谷正芳
Periodical title: 光アライアンス / 光アライアンス編集委員会編
No. or year of volume/issue: 19(11) (通号 218) 2008.11
Volume: 19
Issue: 11
Sequential issue number: 218
Pages: 40～44
Publication date of volume/issue (W3CDTF): 2008-11
ISSN (Periodical Title): 0917-026X
ISSN-L (Periodical Title): 0917-026X
Publication (Periodical Title): 東京 : 日本工業出版
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-2199
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9688272
http://id.ndl.go.jp/bib/9688272
Bibliographic Record Category (NDL): 632