マシニングセンタ型ナノ加工・計測システムの開発に関する研究
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- Material Type
- 記事
- Author/Editor
- 稲垣 清紀森田 昇芦田 極 他
- Alternative Title
- Study for development of nano-machining and measurement system of machining center type
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 74(11) (通号 887) 2008.11
- Volume
- 74
- Issue
- 11
- Sequential issue number
- 887