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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 龍頭 啓充尾崎 良介高岡 義寛
- Series Title
- Alternative Title
- Low-damage high-rate sputtering of silicon induced by ethanol cluster ion beam
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 108(335) 2008.12.5
- Volume
- 108
- Issue
- 335