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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 横谷 篤至
- Series Title
- Author Heading
- Alternative Title
- Processings for ultra-thin films of nitrides utilizing the vacuum ultraviolet radiation
- Periodical title
- 化學工業
- No. or year of volume/issue
- 60(2) (通号 708) 2009.2
- Volume
- 60
- Issue
- 2