ナノプロセス用電子ビーム多価イオン源の開発(2)

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Material Type: 記事
Title: ナノプロセス用電子ビーム多価イオン源の開発(2)
Author/Editor: 櫻井誠
坂上裕之
渡辺裕文他
Author Heading: 櫻井誠
坂上裕之
渡辺裕文
Alternative Title: Development of electron beam ion source for nanoprocesses (2)
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 50(5) 2007.5
Volume: 50
Issue: 5
Pages: 390～393
Publication date of volume/issue (W3CDTF): 2007-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8847196
http://id.ndl.go.jp/bib/8847196
Bibliographic Record Category (NDL): 632