可搬型超高真空試料搬送導入装置の開発とその応用

Detailed bibliographic record

Summary, etc.：: We have developed a portable ultrahigh-vacuum sample transfer vessel. The size of the vessel is about 55 cm in length, and 5.2 kg in weight. The lowes...

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Material Type: 記事
Title: 可搬型超高真空試料搬送導入装置の開発とその応用
Volume: 60
4
Author/Editor: 小林英一
田中秀吉
岡島敏浩
Author Heading: 小林英一
KOBAYASHI Eiichi
田中秀吉
TANAKA Shukichi
岡島敏浩
OKAJIMA Toshihiro
Publication Date: 2017
Publication Date (W3CDTF): 2017
Alternative Title: Development of a Portable Ultrahigh-Vacuum Sample Transfer Vessel and Its Application
Periodical title: Journal of the Vacuum Society of Japan
No. or year of volume/issue: 60 4
Volume: 60
Issue: 4
Pages: 139-141
ISSN (Periodical Title): 1882-2398
1882-4749
Alias of Author: KOBAYASHI Eiichi
TANAKA Shukichi
OKAJIMA Toshihiro
Target Audience: 一般
DOI: 10.3131/jvsj2.60.139
Access Restrictions: インターネット公開
Data Provider (Database): 科学技術振興機構 : J-STAGE