GD-OESを用いためっき中微量元素特定手法の検討

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Material Type: 記事
Title: GD-OESを用いためっき中微量元素特定手法の検討
Author Heading: 大西里佳
吉田正沖
山内康生
Publication Date: 2024
Publication Date (W3CDTF): 2024
Periodical title: Journal of Surface Analysis
No. or year of volume/issue: 30 3
Volume: 30
Issue: 3
Pages: 200-
Publication date of volume/issue (W3CDTF): 2024
ISSN (Periodical Title): 13411756
ISSN-L (Periodical Title): 13411756
Publication (Periodical Title): The Surface Analysis Society of Japan
Text Language Code: ja
Target Audience: 一般
DOI: 10.1384/jsa.30.200
https://doi.org/10.1384/jsa.30.200
Related Material (URI): https://www.jstage.jst.go.jp/article/jsa/30/3/30_200/_pdf
References: Improving copper electrodeposition in the microelectronics industry
https://cir.nii.ac.jp/crid/1360863728191635712
薄膜の密着性　　めっき皮膜の密着性とその改善方法
https://cir.nii.ac.jp/crid/1390001204119176192
Data Provider (Database): 国立情報学研究所 : CiNii Research
https://cir.nii.ac.jp/
Original Data Provider (Database): Japan Link Center
https://japanlinkcenter.org/top
Crossref
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