Multirate Control Techniques for Fast and Precise Positioning and Applications to High-Precision Stages
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- Material Type
- 博士論文
- Author/Editor
- Sakata, Koichi
- Author Heading
- Publication Date
- 2011
- Publication Date (W3CDTF)
- 2011
- Alternative Title
- 高速高精度位置決めのためのマルチレート制御技術と超精密ステージへの応用
- Text Language Code
- eng
- NDLC
- Target Audience
- 一般