特殊高圧ガス消費設備 : ガスを原料とした半導体薄膜の作製

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Material Type: 文書・図像類
Title: 特殊高圧ガス消費設備 : ガスを原料とした半導体薄膜の作製
Title Transcription: トクシュコウアツガスショウヒセツビ : ガスオゲンリョウトシタハンドウタイハクマクノサクセイ
Author/Editor: 荻原, 千聡
Author Heading: 荻原, 千聡
Publication, Distribution, etc.: 山口大学ベンチャービジネスラボラトリー
Publication Date: 2003
Publication Date (W3CDTF): 2003
Periodical title: 山口大学ベンチャービジネスラボラトリー年報
No. or year of volume/issue: 7
Volume: 7
Pages: 64-64
Text Language Code: jpn
Target Audience: 一般
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 山口大学 : 山口大学学術機関リポジトリYUNOCA