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文書・図像類

超高真空蒸着装置 : 洗浄真空下における薄膜新材料・デバイスの作製

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超高真空蒸着装置 : 洗浄真空下における薄膜新材料・デバイスの作製

Material type
文書・図像類
Author
中山, 則昭ほか
Publisher
山口大学ベンチャービジネスラボラトリー
Publication date
2004
Material Format
Paper
Capacity, size, etc.
-
NDC
-
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Paper

Material Type
文書・図像類
Title Transcription
チョウコウ シンクウ ジョウチャク ソウチ センジョウ シンクウカ ニオケル ハクマク シンザイリョウ デバイス ノ サクセイ
Author/Editor
中山, 則昭
諸橋, 信一
Publication Date
2004
Publication Date (W3CDTF)
2004
Periodical title
山口大学ベンチャービジネスラボラトリー年報
No. or year of volume/issue
8