熱CVDプロセスにおける反応モデルの構築および熱物質移動解析

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Material Type: 博士論文
Title: 熱CVDプロセスにおける反応モデルの構築および熱物質移動解析
Author/Editor: 羽鳥, 祐耶
Author Heading: 羽鳥, 祐耶
Publication Date: 2015
Publication Date (W3CDTF): 2015
Alternative Title: Construction of reaction model and heat and mass transfer analysis in thermal CVD process
Degree grantor/type: 山口大学
Date Granted: 2015-03-16
Dissertation Number: 理工博甲第656号
Degree Type: 博士(工学)
Text Language Code: und
Target Audience: 一般
Format (IMT): application/pdf
Source: fulltext
https://petit.lib.yamaguchi-u.ac.jp/25144/files/156664
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 山口大学 : 山口大学学術機関リポジトリYUNOCA