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文書・図像類

InAlN層におけるデバイスプロセス中に発生した欠陥評価とその電気的特性への影響

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InAlN層におけるデバイスプロセス中に発生した欠陥評価とその電気的特性への影響

Material type
文書・図像類
Author
奥村 宏典
Publisher
-
Publication date
2017
Material Format
Digital
Capacity, size, etc.
-
NDC
-
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Notes on use

Note (General):

科学研究費助成事業 研究成果報告書:研究活動スタート支援2015-2016課題番号 : 15H06070

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Digital

Material Type
文書・図像類
Author/Editor
奥村 宏典
Author Heading
Publication Date
2017
Publication Date (W3CDTF)
2017
Alternative Title
Defect Evaluation of InAlN after Device Process and their Electrical Properties
Text Language Code
jpn
Target Audience
一般
Note (General)
科学研究費助成事業 研究成果報告書:研究活動スタート支援2015-2016課題番号 : 15H06070