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窒素極性面AlNの接触抵抗低減と分極効果トランジスタの実現

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窒素極性面AlNの接触抵抗低減と分極効果トランジスタの実現

Material type
文書・図像類
Author
奥村 宏典
Publisher
-
Publication date
2019
Material Format
Digital
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Note (General):

科学研究費助成事業 研究成果報告書:若手研究(B)2017-2018課題番号 : 17K14110

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Digital

Material Type
文書・図像類
Author/Editor
奥村 宏典
Author Heading
Publication Date
2019
Publication Date (W3CDTF)
2019
Alternative Title
Reduction of contact resistance and demonstration of nitrogen-polar AlN field-effect transistors
Text Language Code
jpn
Target Audience
一般
Note (General)
科学研究費助成事業 研究成果報告書:若手研究(B)2017-2018課題番号 : 17K14110