窒素極性面AlNの接触抵抗低減と分極効果トランジスタの実現
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- Material Type
- 文書・図像類
- Author/Editor
- 奥村 宏典
- Author Heading
- Publication Date
- 2019
- Publication Date (W3CDTF)
- 2019
- Alternative Title
- Reduction of contact resistance and demonstration of nitrogen-polar AlN field-effect transistors
- Text Language Code
- jpn
- Target Audience
- 一般
- Note (General)
- 科学研究費助成事業 研究成果報告書:若手研究(B)2017-2018課題番号 : 17K14110