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ワイドギャップ半導体(SiCおよびGaN)MOS界面欠陥の電子スピン共鳴分光同定

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ワイドギャップ半導体(SiCおよびGaN)MOS界面欠陥の電子スピン共鳴分光同定

Material type
文書・図像類
Author
梅田, 享英
Publisher
-
Publication date
2020
Material Format
Digital
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Note (General):

科学研究費助成事業 研究成果報告書:基盤研究(B)2017-2019課題番号 : 17H02781

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Digital

Material Type
文書・図像類
Author/Editor
梅田, 享英
Author Heading
梅田, 享英 ウメダ, タカヒデ
Publication Date
2020
Publication Date (W3CDTF)
2020
Alternative Title
Electron-spin-resonance characterization on interface defects at wide-gap semiconductor (SiC and GaN) MOS interfaces
Text Language Code
jpn
Target Audience
一般
Note (General)
科学研究費助成事業 研究成果報告書:基盤研究(B)2017-2019課題番号 : 17H02781