有機ケイ素ポリマーとオゾンの反応を利用した酸化シリコン膜の高品質化

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Material Type: 博士論文
Title: 有機ケイ素ポリマーとオゾンの反応を利用した酸化シリコン膜の高品質化
Author/Editor: 伊藤, 拓也
Author Heading: 伊藤, 拓也イトウ, タクヤ
Degree grantor/type: 宮崎大学
Date Granted: 2015-03-24
Dissertation Number: 農工総博甲第95号
Degree Type: 博士(工学)
Text Language Code: jpn
Target Audience: 一般
Note (General): 2014年度
Format (IMT): application/pdf
Source: 博士学位論文（fulltext）
https://miyazaki-u.repo.nii.ac.jp/record/4487/files/a95honbun.pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 宮崎大学 : 宮崎大学学術情報リポジトリ