多層膜ミラーを用いた軟Ｘ線結像光学系の開発とEUV露光装置への応用

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Material Type: 博士論文
Title: 多層膜ミラーを用いた軟Ｘ線結像光学系の開発とEUV露光装置への応用
Author/Editor: 村上, 勝彦
Murakami, Katsuhiko
Author Heading: 村上, 勝彦
Murakami, Katsuhiko
Publication, Distribution, etc.: 兵庫県立大学
Degree grantor/type: 兵庫県立大学大学院
Date Granted: 2013-09-26
Dissertation Number: 乙第42号
Degree Type: 博士（工学）
Text Language Code: jpn
Target Audience: 一般
Note (General): 2013
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 兵庫県立大学 : 兵庫県立大学学術情報リポジトリ