A precise method for detection of vacuum leakage in a pressure sensor using a pulse discharge technique, for industrial use

Material type: 文書・図像類

Author: UEDA, Mほか

Publisher: Iop Publishing Ltd

Publication date: 1998-06

Material Format: Digital

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Note (General)：: A new method for measuring the vacuum leakage of a pressure sensor proposed by the present authors has been improved so that it can be applied for ind...

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Material Type: 文書・図像類
Title: A precise method for detection of vacuum leakage in a pressure sensor using a pulse discharge technique, for industrial use
Author/Editor: UEDA, M
SUGINO, Y
KAGAWA, K
MATSUI, T
Author Heading: UEDA, M
SUGINO, Y
KAGAWA, K
MATSUI, T
Publication, Distribution, etc.: Iop Publishing Ltd
Publication Date: 1998-06
Publication Date (W3CDTF): 1998-06
Periodical title: Journal of Physics -London- d Applied Physics
No. or year of volume/issue: 31 12
Volume: 31
Issue: 12
Pages: 1465-1470
Text Language Code: eng
Target Audience: 一般
Note (General): A new method for measuring the vacuum leakage of a pressure sensor proposed by the present authors has been improved so that it can be applied for industrial use. The principle of this method is based on the discharge characteristic called Pashen's law. The main improved points are reduction of fluctuation of the discharge potential and extension of the measurable pressure range. As a result, a leakage rate of 1×10‐5 Pa cm3 s-1 can be detected within a day. This sensitivity is comparable to that of the radio-isotope method now in practical use or even higher than that. The measurable pressure range is enlarged from 70-150 Pa to 70 Pa to a few hundreds pascals by employing He gas detect the leakage.
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 福井大学 : 福井大学学術機関リポジトリ