Development of a surface profiler for optical elements

Material type: 文書・図像類

Author: KINOSHITA, Toyohikoほか

Publisher: Elsevier Ltd

Publication date: 2001-07

Material Format: Digital

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Note (General)：: A surface profiler for optical elements used in synchrotron radiation beamlines has been developed. By measuring the precise positions of an incident ...

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Material Type: 文書・図像類
Title: Development of a surface profiler for optical elements
Author/Editor: KINOSHITA, Toyohiko
FUKUI, K
ASAKA, S
YOSHIDA, H
WATANABE, M
HORIGOME, T
PEIJUN, Ma
OHTSUKA, K
IWANAGA, M
OHSHIMA, E
Author Heading: KINOSHITA, Toyohiko
FUKUI, K
ASAKA, S
YOSHIDA, H
WATANABE, M
HORIGOME, T
PEIJUN, Ma
OHTSUKA, K
IWANAGA, M
OHSHIMA, E
Publication, Distribution, etc.: Elsevier Ltd
Publication Date: 2001-07
Publication Date (W3CDTF): 2001-07
Periodical title: Nuclear Instruments and Methods in Physics Research Section A
No. or year of volume/issue: 467-468 1
Volume: 467-468
Issue: 1
Pages: 329-332
Text Language Code: eng
Subject Heading: Surface profiler
Optical elements
Synchrotron radiation beamlines
Target Audience: 一般
Note (General): A surface profiler for optical elements used in synchrotron radiation beamlines has been developed. By measuring the precise positions of an incident and reflected laser beam, the surface profile of mirrors and gratings can be obtained. The profile of large mirrors up to 700 mm long and that of any other shape device such as plane and non-spherical mirrors can be also measured. The design concept and preliminary examples of profile measurements are reported.
Access Restrictions: 限定公開
Related Material (DOI): 10.1016/S0168-9002(01)00313-8
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 福井大学 : 福井大学学術機関リポジトリ